Murata flaunts tiny SMT MEMS angular acceleration sensor
Murata has revealed what it says is the successful development of what is believed to be the world’s first surface mount MEMS angular acceleration sensor.
Recent years have seen a growing customer demand for angular acceleration sensors with compact dimensions, which also feature high sensitivity, low noise and wide frequency band. Recognising this demand, Murata combined its technology for designing inertial sensors such as acceleration and gyro sensors with its MEMS process technology.
According to the company, the unit is also believed to be the world’s smallest SMD-type angular acceleration sensor, the accelerometer has dimensions of just 5.2mm x 2.5mm typ. x 0.8mm max. It incorporates a detection frequency band of more than 1kHz and an angular acceleration equivalent noise effective value of less than 1rad/s2ms.
Murata’s surface mount MEMS angular acceleration sensor can be used for the detection of angular acceleration and the detection of rotational vibration.
The unit has been patent registered in Japan and overseas and has more than 10 patents pending.